B. Lakshmi and R. Srinivasan
Department of Information Technology, SSN College of Engineering, Kalavakkam – 603 110, Chennai, India
ABSTRACT
This paper investigates the effect of process variations on unity gain frequency (ft) in 30 nm gate length FinFET by performing extensive TCAD simulations. Six different geometrical parameters, channel doping, source/drain doping and gate electrode work function are studied for their sensitivity on ft . It is found that ft is more sensitive to gate length, underlap, gate-oxide thickness, channel and Source/Drain doping and less sensitive to source/drain width and length, and work function variations. Statistical modelling has been performed for ft through design of experiment with respect to sensitive parameters. The model has been validated through a comparison between random set of experimental data simulations and predicted values obtained from the model.
KEYWORDS
ft , FinFET, process variations, Statistical modelling, Design of Experiments
Original Source URL: https://aircconline.com/vlsics/V1N3/0910vlsics04.pdf
http://airccse.org/journal/vlsi/vol1.html
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